Dielectric characteristics of spin-coated dielectric films using on-wafer parallel-plate capacitors at microwave frequencies Al-Omari, Ahmad N. ; Lear, Kevin L. "This work has been supported in part by the Defense Advanced Research Projects Agency under contract number DAAD19-03-1-0059 and by Yarmouk University in Irbid, Jordan." Dielectric properties of spin-coated dielectric insulators suitable for high-speed device fabrication are investigated. Complex dielectric permittivities and tangential losses of two polyimides, bisbenzocyclobutene(BCB), and a spin-on-glass(SOG) were extracted from the measured microwave reflection coefficient, S11, of parallel-plate capacitors over a frequency range of 50 MHz to 40 GHz. A model for the dielectric permittivity as a function of frequency is developed based on measured data with a minimum square error of less than 10-4 between measured and modeled microwave reflection coefficients. A circuit model for the pad capacitance is obtained based on geometrical and physical considerations. The relationship between the dielectric loss and its thickness is considered. Experimental results are fitted to Debye and Cole-Cole models. Colorado State University. Libraries 2005 text ; image application/pdf ECEkll00021.pdf FACFECEN100371ARTI eng c2005 IEEE
Dielectric characteristics of spin-coated dielectric films using on-wafer parallel-plate capacitors at microwave frequencies
Al-Omari, Ahmad N. ; Lear, Kevin L.
"This work has been supported in part by the Defense Advanced Research Projects Agency under contract number DAAD19-03-1-0059 and by Yarmouk University in Irbid, Jordan."
Dielectric properties of spin-coated dielectric insulators suitable for high-speed device fabrication are investigated. Complex dielectric permittivities and tangential losses of two polyimides, bisbenzocyclobutene(BCB), and a spin-on-glass(SOG) were extracted from the measured microwave reflection coefficient, S11, of parallel-plate capacitors over a frequency range of 50 MHz to 40 GHz. A model for the dielectric permittivity as a function of frequency is developed based on measured data with a minimum square error of less than 10-4 between measured and modeled microwave reflection coefficients. A circuit model for the pad capacitance is obtained based on geometrical and physical considerations. The relationship between the dielectric loss and its thickness is considered. Experimental results are fitted to Debye and Cole-Cole models.
Colorado State University. Libraries
2005
text ; image
application/pdf
ECEkll00021.pdf
FACFECEN100371ARTI
eng
c2005 IEEE